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Filtered vacuum arc deposition of transparent conducting Al-doped ZnO films
V.N. Zhitomirsky, E. Çetinörgü, E. Adler, Yu. Rosenberg, R.L. Boxman, S. GoldsmithVolume:
515
Year:
2006
Language:
english
Pages:
6
DOI:
10.1016/j.tsf.2006.07.150
File:
PDF, 371 KB
english, 2006