Guiding the deposition flux in an ionized magnetron...

Guiding the deposition flux in an ionized magnetron discharge

J. Bohlmark, M. Östbye, M. Lattemann, H. Ljungcrantz, T. Rosell, U. Helmersson
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Volume:
515
Year:
2006
Language:
english
Pages:
4
DOI:
10.1016/j.tsf.2006.07.183
File:
PDF, 257 KB
english, 2006
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