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Effect of film thickness and the presence of surface fluorine on the structure of a thin barrier film deposited from tetrakis-(dimethylamino)-titanium onto a Si(100)-2 × 1 substrate
Chaoying Ni, Zhanping Zhang, Matthew Wells, Thomas P. Beebe Jr., Laurent Pirolli, Lucila P. Méndez De Leo, Andrew V. TeplyakovVolume:
515
Year:
2007
Language:
english
Pages:
10
DOI:
10.1016/j.tsf.2006.08.046
File:
PDF, 1.74 MB
english, 2007