Fabrication of p-type fin field-effect-transistors by solid-phase boron diffusion process using thin film doping sources
Won-Ju Cho, Sang-Mo KooVolume:
515
Year:
2007
Language:
english
Pages:
5
DOI:
10.1016/j.tsf.2006.09.010
File:
PDF, 1.06 MB
english, 2007