Localisation of the p-n junction in poly-silicon thin-film...

Localisation of the p-n junction in poly-silicon thin-film diodes on glass by high-resolution cross-sectional electron-beam induced current imaging

Daniel Inns, Tom Puzzer, Armin G. Aberle
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Volume:
515
Year:
2007
Language:
english
Pages:
4
DOI:
10.1016/j.tsf.2006.09.053
File:
PDF, 588 KB
english, 2007
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