Influence of chemical etching on step bunching formation on...

Thin Solid Films 2007 Vol. 515; Iss. 7-8

Influence of chemical etching on step bunching formation on GaAs (100) during thermal oxide removal

A. Guillén-Cervantes, Z. Rivera-Alvarez, M. López-López, A. Escobosa, V.M. Sánchez-Reséndiz
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Volume:
515
Year:
2007
Language:
english
Pages:
3
DOI:
10.1016/j.tsf.2006.10.004
File:
PDF, 919 KB
english, 2007
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