Low-Temperature Epitaxy on Polycrystalline Silicon Substrates
Wagner, Thomas A., Oberbeck, L., Bergmann, R.B., Nerding, M., Strunk, Horst P., Werner, JensVolume:
93
Year:
2003
Journal:
Solid State Phenomena
DOI:
10.4028/www.scientific.net/SSP.93.121
File:
PDF, 492 KB
2003