The effect of target aging on the structure formation of...

Thin Solid Films 2007 Vol. 515; Iss. 7-8

The effect of target aging on the structure formation of zinc oxide during reactive sputtering

D. Severin, O. Kappertz, T. Nyberg, S. Berg, M. Wuttig
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Volume:
515
Year:
2007
Language:
english
Pages:
5
DOI:
10.1016/j.tsf.2006.10.130
File:
PDF, 545 KB
english, 2007
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