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Comparative analysis of amorphous silicon and silicon nitride multilayer by spectroscopic ellipsometry and transmission electron microscopy
M. Serenyi, T. Lohner, P. Petrik, C. FrigeriVolume:
515
Year:
2007
Language:
english
Pages:
4
DOI:
10.1016/j.tsf.2006.10.137
File:
PDF, 411 KB
english, 2007