![](/img/cover-not-exists.png)
Influence of aluminum nitride interlayers on crystal orientation and piezoelectric property of aluminum nitride thin films prepared on titanium electrodes
Toshihiro Kamohara, Morito Akiyama, Naohiro Ueno, Kazuhiro Nonaka, Noriyuki KuwanoVolume:
515
Year:
2007
Language:
english
Pages:
5
DOI:
10.1016/j.tsf.2006.11.032
File:
PDF, 475 KB
english, 2007