Influence of aluminum nitride interlayers on crystal...

Influence of aluminum nitride interlayers on crystal orientation and piezoelectric property of aluminum nitride thin films prepared on titanium electrodes

Toshihiro Kamohara, Morito Akiyama, Naohiro Ueno, Kazuhiro Nonaka, Noriyuki Kuwano
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Volume:
515
Year:
2007
Language:
english
Pages:
5
DOI:
10.1016/j.tsf.2006.11.032
File:
PDF, 475 KB
english, 2007
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