![](/img/cover-not-exists.png)
Characterization of the silicon oxide thin films deposited on polyethylene terephthalate substrates by radio frequency reactive magnetron sputtering
M.-C. Lin, C.-H. Tseng, L.-S. Chang, D.-S. WuuVolume:
515
Year:
2007
Language:
english
Pages:
7
DOI:
10.1016/j.tsf.2006.11.039
File:
PDF, 1.79 MB
english, 2007