Enhanced oxygen exchange near the oxide/silicon interface during silicon thermal oxidation
Masashi Uematsu, Marika Gunji, Masaru Tsuchiya, Kohei M. ItohVolume:
515
Year:
2007
Language:
english
Pages:
5
DOI:
10.1016/j.tsf.2006.11.052
File:
PDF, 296 KB
english, 2007