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SPIE Proceedings [SPIE Micromachining and Microfabrication '96 - Austin, TX (Monday 14 October 1996)] Micromachining and Microfabrication Process Technology II - Characterization of residual stress in metallic films on silicon with micromechanical devices
Boutry, Mathilde, Bosseboeuf, Alain, Coffignal, Gerard, Pang, Stella W., Chang, Shih-ChiaVolume:
2879
Year:
1996
Language:
english
DOI:
10.1117/12.251239
File:
PDF, 627 KB
english, 1996