Hydrogenation of nanocrystalline Si thin film transistors employing inductively coupled plasma chemical vapor deposition for flexible electronics
Sang-Myeon Han, Joong-Hyun Park, Sang-Geun Park, Sun-Jae Kim, Min-Koo HanVolume:
515
Year:
2007
Language:
english
Pages:
4
DOI:
10.1016/j.tsf.2006.11.147
File:
PDF, 478 KB
english, 2007