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Ion beam deposition of α-Ta films by nitrogen addition and improvement of diffusion barrier property
Joon Woo Bae, Jae-Won Lim, Kouji Mimura, Minoru IsshikiVolume:
515
Year:
2007
Language:
english
Pages:
6
DOI:
10.1016/j.tsf.2006.11.190
File:
PDF, 1.49 MB
english, 2007