Chemical vapor deposition of amorphous ruthenium–phosphorus...

Thin Solid Films 2007 Vol. 515; Iss. 13

Chemical vapor deposition of amorphous ruthenium–phosphorus alloy films

Jinhong Shin, Abdul Waheed, Wyatt A. Winkenwerder, Hyun-Woo Kim, Kyriacos Agapiou, Richard A. Jones, Gyeong S. Hwang, John G. Ekerdt
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Volume:
515
Year:
2007
Language:
english
Pages:
10
DOI:
10.1016/j.tsf.2007.01.002
File:
PDF, 1.54 MB
english, 2007
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