Depth redistribution of components of SiOx layers prepared...

Depth redistribution of components of SiOx layers prepared by magnetron sputtering in the process of their decomposition

L. Khomenkova, N. Korsunska, T. Stara, Ye. Venger, C. Sada, E. Trave, Y. Goldstein, J. Jedrzejewski, E. Savir
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Volume:
515
Year:
2007
Language:
english
Pages:
5
DOI:
10.1016/j.tsf.2007.02.003
File:
PDF, 263 KB
english, 2007
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