Effect of tantalum addition on microstructure and optical properties of TiN thin films
O. Bourbia, S. Achour, N. Tabet, M. Parlinska, A. HarabiVolume:
515
Year:
2007
Language:
english
Pages:
7
DOI:
10.1016/j.tsf.2007.02.055
File:
PDF, 1.90 MB
english, 2007