Effects of hydrogen gas on properties of tin-doped indium...

Effects of hydrogen gas on properties of tin-doped indium oxide films deposited by radio frequency magnetron sputtering method

Do-Geun Kim, Sunghun Lee, Gun-Hwan Lee, Sik-Chol Kwon
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Volume:
515
Year:
2007
Language:
english
Pages:
4
DOI:
10.1016/j.tsf.2007.02.056
File:
PDF, 606 KB
english, 2007
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