Low-temperature hollow cathode plasma-assisted atomic layer deposition of crystalline III-nitride thin films and nanostructures
Ozgit-Akgun, Cagla, Goldenberg, Eda, Bolat, Sami, Tekcan, Burak, Kayaci, Fatma, Uyar, Tamer, Okyay, Ali Kemal, Biyikli, NecmiVolume:
12
Language:
english
Journal:
physica status solidi (c)
DOI:
10.1002/pssc.201400167
Date:
April, 2015
File:
PDF, 412 KB
english, 2015