Investigation of thermal stability of Mo thin-films as the buffer layer and various Cu metallization as interconnection materials for thin film transistor–liquid crystal display applications
Yee-Wen Yen, Yu-Lin Kuo, Jian-Yu Chen, Chiapyng Lee, Chung-Yu LeeVolume:
515
Year:
2007
Language:
english
Pages:
8
DOI:
10.1016/j.tsf.2007.02.107
File:
PDF, 1.05 MB
english, 2007