The roles of hydrophobic group on the surface of ultra low...

Thin Solid Films 2007 Vol. 515; Iss. 18

The roles of hydrophobic group on the surface of ultra low dielectric constant porous silica film during thermal treatment

Jen-Tsung Luo, Wen-Fa Wu, Hua-Chiang Wen, Ben-Zu Wan, Yu-Ming Chang, Chang-Pin Chou, Jun-Ming Chen, Wu-Nan Chen
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Volume:
515
Year:
2007
Language:
english
Pages:
6
DOI:
10.1016/j.tsf.2007.03.028
File:
PDF, 899 KB
english, 2007
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