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Longitudinal and transversal piezoresistive effect in hydrogenated amorphous carbon films
A. Tibrewala, E. Peiner, R. Bandorf, S. Biehl, H. LüthjeVolume:
515
Year:
2007
Language:
english
Pages:
6
DOI:
10.1016/j.tsf.2007.03.046
File:
PDF, 634 KB
english, 2007