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Fabrication of Si-based planar type patch clamp biosensor using silicon on insulator substrate
Z.L. Zhang, T. Asano, H. Uno, R. Tero, M. Suzui, S. Nakao, T. Kaito, K. Shibasaki, M. Tominaga, Y. Utsumi, Y.L. Gao, T. UrisuVolume:
516
Year:
2008
Language:
english
Pages:
3
DOI:
10.1016/j.tsf.2007.04.104
File:
PDF, 287 KB
english, 2008