![](/img/cover-not-exists.png)
Thermal furnace and Ultraviolet assisted curing impact on SiOCH spin-on ultra low dielectric constant materials
A. Zenasni, B. Remiat, C. Waldfried, Ch. Le Cornec, V. Jousseaume, G. PassemardVolume:
516
Year:
2008
Language:
english
Pages:
7
DOI:
10.1016/j.tsf.2007.05.010
File:
PDF, 565 KB
english, 2008