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Hydrogen influence on the structure and properties of amorphous hydrogenated carbon films deposited by direct ion beam
M. Silinskas, A. Grigonis, V. Kulikauskas, I. ManikaVolume:
516
Year:
2008
Language:
english
Pages:
10
DOI:
10.1016/j.tsf.2007.05.015
File:
PDF, 854 KB
english, 2008