Room-temperature growth of AlN/TiN epitaxial multi-layer by...

Thin Solid Films 2008 Vol. 516; Iss. 10

Room-temperature growth of AlN/TiN epitaxial multi-layer by laser molecular beam epitaxy

Wakana Hara, Jin Liu, Atsushi Sasaki, Sei Otaka, Norihiro Tateda, Keisuke Saito, Mamoru Yoshimoto
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
516
Year:
2008
Language:
english
Pages:
5
DOI:
10.1016/j.tsf.2007.05.070
File:
PDF, 567 KB
english, 2008
Conversion to is in progress
Conversion to is failed