Comparative study on early stages of film growth for...

Thin Solid Films 2008 Vol. 516; Iss. 14

Comparative study on early stages of film growth for transparent conductive oxide films deposited by dc magnetron sputtering

Yasushi Sato, Mikihiro Taketomo, Norihiro Ito, Amica Miyamura, Yuzo Shigesato
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Volume:
516
Year:
2008
Language:
english
Pages:
5
DOI:
10.1016/j.tsf.2007.05.091
File:
PDF, 628 KB
english, 2008
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