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Diffusion of Implanted Tellurium-121 into Silicon
Rollert, F., Stolwijk, Nicolaas, Mehrer, HelmutVolume:
95-98
Year:
1993
Journal:
Defect and Diffusion Forum
DOI:
10.4028/www.scientific.net/DDF.95-98.949
File:
PDF, 356 KB
1993