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High resolution X-ray photoelectron spectroscopy of beta gallium oxide films deposited by ultra high vacuum radio frequency magnetron sputtering
Toshio Takeuchi, Hiroki Ishikawa, Norikazu Takeuchi, Yoshiji HorikoshiVolume:
516
Year:
2008
Language:
english
Pages:
5
DOI:
10.1016/j.tsf.2007.06.075
File:
PDF, 802 KB
english, 2008