Near-interfacial delamination failures observed in...

Thin Solid Films 2007 Vol. 516; Iss. 2-4

Near-interfacial delamination failures observed in ion-beam-sputtered Ta2O5/SiO2 multi-layer stacks

Marius Grigonis, Wilhelm Hebenstreit, Markus K. Tilsch
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Volume:
516
Year:
2007
Language:
english
Pages:
5
DOI:
10.1016/j.tsf.2007.06.133
File:
PDF, 549 KB
english, 2007
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