Detection of Metallic Contaminants on Silicon by Surface...

Detection of Metallic Contaminants on Silicon by Surface Sensitive Minority Carrier Lifetime Measurements

Norga, G. J.
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Volume:
145
Year:
1998
Language:
english
Journal:
Journal of The Electrochemical Society
DOI:
10.1149/1.1838688
File:
PDF, 2.84 MB
english, 1998
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