Cat-CVD SiN passivation films for OLEDs and packaging

Thin Solid Films 2008 Vol. 516; Iss. 5

Cat-CVD SiN passivation films for OLEDs and packaging

Akira Heya, Toshiharu Minamikawa, Toshikazu Niki, Shigehira Minami, Atsushi Masuda, Hironobu Umemoto, Naoto Matsuo, Hideki Matsumura
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
516
Year:
2008
Language:
english
Pages:
5
DOI:
10.1016/j.tsf.2007.06.220
File:
PDF, 770 KB
english, 2008
Conversion to is in progress
Conversion to is failed