Fabrication of Ta3N5–Ag nanocomposite thin films with high...

Thin Solid Films 2008 Vol. 516; Iss. 16

Fabrication of Ta3N5–Ag nanocomposite thin films with high resistivity and near-zero temperature coefficient of resistance

In-Soo Park, Se-Young Park, Geun-Hee Jeong, Suok-Min Na, Su-Jeong Suh
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Volume:
516
Year:
2008
Language:
english
Pages:
5
DOI:
10.1016/j.tsf.2007.07.021
File:
PDF, 1.18 MB
english, 2008
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