Plasma properties of CrOx films synthesized by a cathodic...

Thin Solid Films 2008 Vol. 516; Iss. 16

Plasma properties of CrOx films synthesized by a cathodic arc evaporation process

Yin-Yu Chang, Shun-Jan Yang, Yu-Hsien Liu, Da-Yung Wang
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Volume:
516
Year:
2008
Language:
english
Pages:
5
DOI:
10.1016/j.tsf.2007.07.023
File:
PDF, 346 KB
english, 2008
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