Crystallography of TiSi2 (C54) epitaxy on (111)Si and...

Thin Solid Films 2008 Vol. 516; Iss. 16

Crystallography of TiSi2 (C54) epitaxy on (111)Si and (001)Si surfaces

Ming-Xing Zhang, Dong Qiu, Patrick M. Kelly
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Volume:
516
Year:
2008
Language:
english
Pages:
5
DOI:
10.1016/j.tsf.2007.07.036
File:
PDF, 267 KB
english, 2008
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