A new fabrication method of low stress PECVD SiNx layers...

Thin Solid Films 2008 Vol. 516; Iss. 16

A new fabrication method of low stress PECVD SiNx layers for biomedical applications

Jiashen Wei, Poh Lam Ong, Francis E.H. Tay, Ciprian Iliescu
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Volume:
516
Year:
2008
Language:
english
Pages:
8
DOI:
10.1016/j.tsf.2007.07.051
File:
PDF, 887 KB
english, 2008
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