Effects of outgassing on the reactive sputtering of...

Thin Solid Films 2008 Vol. 516; Iss. 16

Effects of outgassing on the reactive sputtering of piezoelectric AlN thin films

J.S. Cherng, D.S. Chang
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Volume:
516
Year:
2008
Language:
english
Pages:
4
DOI:
10.1016/j.tsf.2007.07.080
File:
PDF, 481 KB
english, 2008
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