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Plasma surface interaction in PACVD and PVD systems during TiAlBN nanocomposite hard thin films deposition
R. Avni, I. Fried, A. Raveh, I. ZukermanVolume:
516
Year:
2008
Language:
english
Pages:
7
DOI:
10.1016/j.tsf.2007.07.093
File:
PDF, 1017 KB
english, 2008