Structural and Optical Studies on Ion-implanted 6H–SiC Thin...

Thin Solid Films 2008 Vol. 516; Iss. 16

Structural and Optical Studies on Ion-implanted 6H–SiC Thin Films

Z.C. Feng, S.C. Lien, J.H. Zhao, X.W. Sun, W. Lu
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Volume:
516
Year:
2008
Language:
english
Pages:
6
DOI:
10.1016/j.tsf.2007.07.094
File:
PDF, 728 KB
english, 2008
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