Influence of target to substrate distance on the sputtered...

Thin Solid Films 2008 Vol. 516; Iss. 16

Influence of target to substrate distance on the sputtered CuCl film properties

Gomathi Natarajan, S. Daniels, D.C. Cameron, P.J. McNally
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Volume:
516
Year:
2008
Language:
english
Pages:
5
DOI:
10.1016/j.tsf.2007.07.112
File:
PDF, 425 KB
english, 2008
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