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Tribological properties of multilayer DLC/W-DLC films on Si
Hiroyuki Miki, Takanori Takeno, Toshiyuki TakagiVolume:
516
Year:
2008
Language:
english
Pages:
5
DOI:
10.1016/j.tsf.2007.07.113
File:
PDF, 1.17 MB
english, 2008