Surface and mechanical characterization of TaN–Ag...

Thin Solid Films 2008 Vol. 516; Iss. 16

Surface and mechanical characterization of TaN–Ag nanocomposite thin films

C.C. Tseng, J.H. Hsieh, W. Wu, S.Y. Chang, C.L. Chang
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Volume:
516
Year:
2008
Language:
english
Pages:
6
DOI:
10.1016/j.tsf.2007.07.114
File:
PDF, 2.44 MB
english, 2008
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