Study of Cu emergence on the surface of TaN-Cu...

Thin Solid Films 2008 Vol. 516; Iss. 16

Study of Cu emergence on the surface of TaN-Cu nanocomposite thin films and its effects on tribological property

J.H. Hsieh, M.K. Cheng, C. Li, S.H. Chen, Y.G. Chang
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Volume:
516
Year:
2008
Language:
english
Pages:
5
DOI:
10.1016/j.tsf.2007.07.116
File:
PDF, 1.82 MB
english, 2008
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