Plasma enhanced chemical vapor deposition of a-C:H films in...

Plasma enhanced chemical vapor deposition of a-C:H films in CH4–CO2 plasma: Gas composition and substrate biasing effects on the film structure and growth process

G. Gottardi, N. Laidani, R. Bartali, V. Micheli, M. Anderle
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
516
Year:
2008
Language:
english
Pages:
9
DOI:
10.1016/j.tsf.2007.07.179
File:
PDF, 868 KB
english, 2008
Conversion to is in progress
Conversion to is failed