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Substrate biasing effects on the microstructure of magnetron-sputtered AlN films investigated by in situ reflectance interferometry
P. Pigeat, T. EaswarakhanthanVolume:
516
Year:
2008
Language:
english
Pages:
8
DOI:
10.1016/j.tsf.2007.07.214
File:
PDF, 1.21 MB
english, 2008