Time-resolved optical emission spectroscopy of pulsed RF...

Thin Solid Films 2008 Vol. 516; Iss. 11

Time-resolved optical emission spectroscopy of pulsed RF plasmas with copper magnetron sputtering

Namjun Kang, Junghoon Park, Soo-ghee Oh, Yongmo Kim, Jeon-geon Han
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Volume:
516
Year:
2008
Language:
english
Pages:
4
DOI:
10.1016/j.tsf.2007.08.017
File:
PDF, 556 KB
english, 2008
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