High via resistance induced by ionized metal plasma vapor deposition of titanium liner film
Chengyu Niu, Fuchao Wang, Greg Magsamen, Binh Le, Brian StephensonVolume:
516
Year:
2008
Language:
english
Pages:
6
DOI:
10.1016/j.tsf.2007.08.061
File:
PDF, 1.53 MB
english, 2008