Disordered mesoporous silica low-k thin films prepared by...

Thin Solid Films 2008 Vol. 516; Iss. 15

Disordered mesoporous silica low-k thin films prepared by vapor deposition into a triblock copolymer template film

Takanori Maruo, Shunsuke Tanaka, Hugh W. Hillhouse, Norikazu Nishiyama, Yasuyuki Egashira, Korekazu Ueyama
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Volume:
516
Year:
2008
Language:
english
Pages:
6
DOI:
10.1016/j.tsf.2007.08.124
File:
PDF, 1.00 MB
english, 2008
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