Microstructure and hardening mechanisms in a-Si3N4/nc-TiN nanostructured multilayers
Lihua Yu, Shirun Dong, Junhua Xu, Isao KojimaVolume:
516
Year:
2008
Language:
english
Pages:
7
DOI:
10.1016/j.tsf.2007.09.022
File:
PDF, 812 KB
english, 2008